发明名称 PROBE AND METHOD FOR A SCANNING PROBE MICROSCOPE
摘要 A measurement instrument probe has an outwardly extending sensing lever having at least two sections, one section that, at least during operation, has a different effective spring constant than an effective spring constant of another section of the lever. The sensing lever preferably includes a cantilever that is fixed at or adjacent one end of the cantilever, and includes a probing lever stage is preferably disposed at or adjacent to a free end of the cantilever and the cantilever can be driven or excited in a manner that causes the probing lever stage to have an effective spring constant, k<SUB>1</SUB>, that is greater than an effective spring constant, k<SUB>2</SUB>, of at least one other lever stage disposed between the probing lever stage and where the cantilever is fixed. Alternatively, the sensing lever is fabricated to include a probing lever stage that is more stiff than at least one other lever stage substantially contiguous therewith.
申请公布号 US2006260388(A1) 申请公布日期 2006.11.23
申请号 US20060380349 申请日期 2006.04.26
申请人 SU CHANMIN;SHI JIAN 发明人 SU CHANMIN;SHI JIAN
分类号 G01B5/28 主分类号 G01B5/28
代理机构 代理人
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