发明名称 Selective deposition of fine particles
摘要 A method for depositing fine particles from a suspension on selected regions of a substrate is disclosed. The particles are deposit on selected regions of a clean hydrophobic semiconductor surface that are surrounded by a wetting boundary. The process is well suited for the growth of semiconductor nanowires that nucleates from fine particle used as a catalyst.
申请公布号 US2006264039(A1) 申请公布日期 2006.11.23
申请号 US20050135126 申请日期 2005.05.23
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 COHEN GUY M.
分类号 H01L21/44 主分类号 H01L21/44
代理机构 代理人
主权项
地址
您可能感兴趣的专利