发明名称 |
Fluorine-containing allyl ether compounds, their copolymers, and resist compositions and anti-reflection file material using such copolymers |
摘要 |
The invention relates to a fluorine-containing allyl ether compound represented by the formula 1, wherein R represents an organic group containing at least one fluorine atom and an alicyclic structure. The invention further relates to a fluorine-containing copolymer containing a first unit derived from the fluorine-containing allyl ether represented by the formula 1; and a second unit derived from a vinyl monomer.
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申请公布号 |
US2006264592(A1) |
申请公布日期 |
2006.11.23 |
申请号 |
US20060492056 |
申请日期 |
2006.07.25 |
申请人 |
CENTRAL GLASS COMPANY, LIMITED |
发明人 |
KOBAYASHI SATORU;KAWAMURA KATSUNORI;YAMANAKA KAZUHIRO;KOMORIYA HARUHIKO;MAEDA KAZUHIKO |
分类号 |
C08F18/20;C07C43/178;C07C43/192;C08F16/24;G03F7/004;G03F7/039;G03F7/09 |
主分类号 |
C08F18/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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