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发明名称
Support for a waveguide conducting mechanical waves
摘要
申请公布号
EP0921373(B1)
申请公布日期
2006.11.22
申请号
EP19980122618
申请日期
1998.11.27
申请人
ASM AUTOMATION SENSORIK MESSTECHNIK GMBH
发明人
STEINICH, KLAUS-MANFRED
分类号
G01B17/00;G10K11/24
主分类号
G01B17/00
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