Measuring nano-scale mechanical displacements by the compression or expansion of a compliant insulator

摘要

A sensor measuring nanometre-scale mechanical displacements, such as those used in readout mechanisms for MEMS (Micro-Electro-Mechanical System) and NEMS (Nano-Electro-Mechanical System). The sensor uses a compliant insulator 3 located between a translating member 6 and a pickup member 5 of the device, whereby the insulator 3 is compressed or expanded respectively when the translating member 6 moves. A measuring device determines the change in an electrical value of the insulator 3 upon its compression or expansion, for example by measuring the capacitance or the tunnel current through the insulator 3. The translating member 6 may comprise a sharp tip for use as an atomic force microscope or may comprise a sensitive detection layer for sensing chemical or physical properties.