发明名称 Scanning systems
摘要 A scanning system uses a multi-beam brush having a widely separated beam, a modulator that controls intensity of pixels in scan beams, an optical system that minimizes scan line bow at the expense of non-uniform scanning beam velocity, and a timing generator that generators a pixel clock signal having a variable period that compensates for the nonuniformity of pixel velocity. The wide separation of scan beams permits the modulator to turn beams on or off with a direction of brightening or darkening in the cross-section of the beams being opposite to the scanning direction. A novel arrangement of the beams in the brush permits a uniform indexing step size to uniformly expose an image region. In one embodiment, the timing generator includes: a source of pixel period values; a select circuit to select pixel period values for pixels, and a counter that loads a counter that loads a first value from the pixel period value selected for a pixel, counts for a period of time indicated by the first value, and asserts a signal marking an end of the period. An additional delay after the signal from the counter can be shorter than the period of a clock signal to the counter but also controlled by the pixel period value.
申请公布号 EP1725013(A1) 申请公布日期 2006.11.22
申请号 EP20060076462 申请日期 2000.03.17
申请人 APPLIED MATERIALS, INC. 发明人 ALLEN, PAUL C.;BOHAN, MICHAEL J.;GREEN, MORRIS H.;HAMAKER, HENRY CHRISTOPHER
分类号 B41J2/44;H04N1/053;G02B26/10;G02F1/33;G03F7/20;H01L21/027;H04N1/113 主分类号 B41J2/44
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