<p>A method for achieving high flow in valves with small actuation distance is described. A detailed description for a silicon microvalve is provided. An algorithm is described for designing optimized valves.</p>
申请公布号
EP1723356(A2)
申请公布日期
2006.11.22
申请号
EP20040789313
申请日期
2004.09.29
申请人
SMC KABUSHIKI KAISHA
发明人
HENNING, ALBERT, K.;SELSER, MICHAEL;COZAD, BRADFORD, A.
