发明名称 Interferometer and shape measuring method
摘要 A wavelength-variable light source is configured to emit a light with a wavelength (X), which is variable within a scan width (”»). An interferometer has a coherent length (”L), which is determinable from (”») and (»). A controller determines an appropriate magnitude of the scan width (”») while a CCD camera captures a fringe image in an exposure time (Te), which is set longer than a time for wavelength scanning.
申请公布号 EP1724550(A1) 申请公布日期 2006.11.22
申请号 EP20060114142 申请日期 2006.05.18
申请人 MITUTOYO CORPORATION 发明人 KAWASAKI, KAZUHIKO;SUZUKI, YOSHIMASA;SESKO, DAVID W
分类号 G01B11/24 主分类号 G01B11/24
代理机构 代理人
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