| 摘要 |
A digital micromirror device and a method of manufacturing the same are provided to reduce the amount of light reflected and scattered by a stationary lower part, by forming the lower part from copper. A digital micromirror device includes a substrate(205) having plural electrodes(225) which are spaced apart from each other at regular intervals, a stationary lower part(265) formed between the electrodes, and plural micromirrors(295) formed on the upper portion of the stationary lower part. The stationary lower part has a constant height from the substrate, and is made of copper. The micromirrors are independently driven by an electrostatic force between the substrate and the electrodes.
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