Digital micro-mirror device with free standing spring tips and distributed address electrodes

摘要

According to one embodiment of the present invention a micro-mirror element comprises a first address portion, a second address portion, and one or more address vias. The first address portion comprises a plurality of address pads distributed in a first layer of the micro-mirror element. The micro-mirror element has a first side and a second side and at least two of the plurality of address pads are distributed on the first side. The second address portion comprises a plurality of address electrodes distributed in a second layer of the micro-mirror element. The one or more address vias are operable to conductively couple the first address portion to the second address portion for the transfer of an address voltage from the first address portion to the second address portion. The distribution of the address pads of the first address portion and the address electrodes of the second address portion causes an electrostatic force provided by the second address portion to be greater than an electrostatic force provided by the first address portion.