СПОСОБ ИЗГОТОВЛЕНИЯ КРИСТАЛЛИЧЕСКИХ ЭЛЕМЕНТОВ И УСТРОЙСТВО ДЛЯ ЕГО ОСУЩЕСТВЛЕНИЯ

摘要

FIELD: electrical and piezoelectric engineering; high-frequency resonators including precision ones. ^ SUBSTANCE: proposed method for manufacturing crystal elements includes chemical and dynamic etching of flat blank in liquid etchant while setting it in circular rotary motion at rotation frequency of 0.3 - 0.53 c-1 and at the same time in reciprocation motion; angle of etchant flow attack relative to blank surface is chosen between 2 and 17 deg.; blank is fused primarily in horizontal plane while turning it through 270 to 300 deg. at circular rotation speed and at the same time rotated relative to symmetry axis normal to its plane. Device implementing proposed method has bowl holding liquid etchant and placed in thermostat, lifting-and-rotating mechanism incorporating electric motor whose shaft carries cam mechanically coupled with movable roller, as well as stacked magazine with cells to receive blanks; annular lobe of cam is slanting at angular length of 270 to 300 deg. so that angle of etchant flow attack between 1 and 17 deg. relative to blank surfaces and steep decent are ensured; specified height of magazine cells is 1.5 to 3.0 mm. ^ EFFECT: enhanced quality of polishing etching and facilitated manufacture. ^ 2 cl, 10 dwg