| 摘要 |
Deposition equipment is provided to reduce remarkably a cooling time of a process tube by cooling the process tube using a cooling unit. Deposition equipment includes a process tube(110) for performing a predetermined process, a flange, a heater, and a cooling unit. The flange(130) is used for supporting the process tube. The flange is connected with a process gas supply line and a process gas exhaust line. The heater(120) is installed at an outer portion of the process tube in order to heat the inside of the process tube. The cooling unit(180) is used for cooling the process tube. The cooling unit is composed of a cooling gas supply module and a cooling gas exhaust module.
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