发明名称 APPARATUS FOR CONTROL COOLING WATER AND METHOD FOR CONTROL COOLING WATER THEREFORE
摘要 A cooling water controlling apparatus and a controlling method of the amount of cooling water using the same are provided to keep the flow rate of cooling water in a predetermined range without the deposition of particles in a cooling line by using a control unit capable of controlling a driving unit. A cooling water controlling apparatus includes a cooling line(40) for supplying or exhausting cooling water, a spin unit, a driving unit, and a control unit. The spin unit is used for generating an electromotive force by using the flow of the cooling water. The driving unit is used for controlling the flow rate of the cooling water. The control unit(30) is used for controlling the driving unit in response to the electromotive force of the spin unit.
申请公布号 KR20060117397(A) 申请公布日期 2006.11.17
申请号 KR20050038786 申请日期 2005.05.10
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 KIM, JUNG NAM
分类号 H01L21/02 主分类号 H01L21/02
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