| 摘要 |
PROBLEM TO BE SOLVED: To precisely detect defects by illumination suitable for detecting the respective defects, as to the defect on a surface of a coating layer and the defect between the coating layer and a molding. SOLUTION: A surface of a work W of an inspection object is imaged by individually or concurrently driving illumination parts 2A, 2B, under illumination thereof, using the workpiece W of configuration with the transparent coating layer formed on a surface of a workpiece body formed of a colored resin, as the inspection object. The defect on the surface of the coating layer appears on an image as an area darker than its periphery, with coaxial epi-illumination by the illumination part 2A. The defect between the coating layer and the workpiece body appears as an area darker or brighter than its periphery, with oblique incidence illumination by the illumination part 2B. COPYRIGHT: (C)2007,JPO&INPIT
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