| 摘要 |
PROBLEM TO BE SOLVED: To provide a focusing ion beam apparatus capable of establishing automatically the processing scanning condition at the time of processing a test piece. SOLUTION: The arithmetic unit 16 selects the optical conditions of a focusing lens 8, variable multi-aperture 10, beam deflecting electrode 11, and objective lens 12 based on data inputted in the input unit 17, and calculates automatically processing scanning conditions of the focusing ion beam 4 on the test piece 2 corresponding to the optical conditions selected. The setting condition data output part 20 outputs data based on the optical conditions and processing scanning conditions selected and calculated by the arithmetic unit 16. The FIB drive part 14 drives the focusing lens 8, beam blanking electrode 9, variable multi-aperture 10, beam deflecting electrode 11, and objective lens 12 based on the optical conditions and processing scanning conditions outputted by the setting condition data output part 20. COPYRIGHT: (C)2007,JPO&INPIT
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