发明名称 Method and device for wetting a substrate with a liquid
摘要 A method for wetting a substrate with a fluid and a substrate is disclosed. The method includes the steps of providing a substrate, providing a wetting fluid, applying a protective layer to the substrate, patterning the protective layer and applying the wetting fluid to exposed wetting areas on the subtrate without direct contact between a wetting apparatus and the substrate surface.
申请公布号 US2006257630(A1) 申请公布日期 2006.11.16
申请号 US20040550475 申请日期 2004.03.22
申请人 HARTWICH GERHARD;FRISCHMANN PETER;WIEDER HERBERT;KRATZMULLER THOMAS;PERSIKE NOBERT 发明人 HARTWICH GERHARD;FRISCHMANN PETER;WIEDER HERBERT;KRATZMULLER THOMAS;PERSIKE NOBERT
分类号 B32B9/00;B01F;B01L99/00;B05D1/00;B05D1/26;B05D1/30;B05D1/32;B05D3/12;B08B3/00;B08B7/00;G03F1/00;G03F7/00;G03F7/40;H01J49/04 主分类号 B32B9/00
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