HF- PLASMA SOURCE WITH PLURALITY OF OUT-OF-PHASE ELECTRODES,申请号CA20062606864-传众专利搜索

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发明名称	HF- PLASMA SOURCE WITH PLURALITY OF OUT-OF-PHASE ELECTRODES
摘要
申请公布号	CA2606864(A1)	申请公布日期	2006.11.16
申请号	CA20062606864	申请日期	2006.05.11
申请人	DUBLIN CITY UNIVERSITY	发明人	ELLINGBOE, ALBERT ROGERS
分类号	H01J37/32	主分类号	H01J37/32
代理机构		代理人
主权项
地址

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