| 摘要 |
PROBLEM TO BE SOLVED: To prevent the overheat and break of a scanner due to an excessive current, even if the deflection limit of the scanner is set erroneously. SOLUTION: A laser scanning microscope, preferably with linear scanning function, is a microscope where radiation light is guided along a sample by using at least one galvanometer scanner 51, where the scanner is provided with a mechanical deflection limitation mechanism, and measurement means 52 and 54 for measuring current increase are provided and are switched off, until the voltage of the scanner 51 reaches below a threshold, when the voltage reaches the threshold value. Preferably, the microscope is provided with an optical and/or acoustic display for displaying the on/off of the switch of the scanner. COPYRIGHT: (C)2007,JPO&INPIT
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