发明名称
摘要 <p>A Plate polarising beam splitter 22 splits an incident laser beam 21 to form a first laser beam 24 and a second laser beam 25. The first laser beam is optically modified using an arcuate reflector 23 so that the first laser beam has a different divergence or convergence from that of the second laser beam. The first laser beam 24 is focussed at a first focus 27 on an optical axis of a focussing lens 26 and the second laser beam is focussed at a second focus 28 on the optical axis for machining a workpiece. The apparatus is suitable for machining with the laser beams steered by a galvanometer scanner.</p>
申请公布号 JP2006525874(A) 申请公布日期 2006.11.16
申请号 JP20060508216 申请日期 2004.05.27
申请人 发明人
分类号 B23K26/38;B23K26/00;B23K26/06;B23K26/067;B23K26/14;B23K26/40;B23K101/40;H01L21/301;H01L21/78 主分类号 B23K26/38
代理机构 代理人
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