发明名称 |
Seed layers, cap layers, and thin films and methods of making thereof |
摘要 |
A seed layer is formed on a substrate using a first biological agent. The seed layer may comprise densified nanoparticles which are bound to the biological agent. The seed layer is then used for a deposition of a metal layer, such as a barrier layer, an interconnect layer, a cap layer and/or a bus line for a solid state device.
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申请公布号 |
US2006254503(A1) |
申请公布日期 |
2006.11.16 |
申请号 |
US20060433824 |
申请日期 |
2006.05.15 |
申请人 |
CAMBRIOS TECHNOLOGIES CORPORATION |
发明人 |
DAI HAIXIA;PAKBAZ KHASHAYAR;SPAID MICHAEL;NIKIFOROV THEO |
分类号 |
C30B23/00 |
主分类号 |
C30B23/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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