| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an exposure device and a method for improving TTR calibration accuracy. <P>SOLUTION: The exposure device is provided which has a projection optical system for projecting an image of a reticle pattern to an object of exposure, a detecting system for detecting a predetermined mark by the projection optical system for focusing the projection optical system and the object, and a control unit for driving to control a member provided toward a reticle from the optical system when the detecting system works to detect. <P>COPYRIGHT: (C)2007,JPO&INPIT |
