| 摘要 |
<p>An apparatus for correcting the magnification of a lens is provided to reduce a measuring time and costs and to correct stably the magnification of the lens in real time by using an automated measurement sensor. An apparatus includes a lens(110) for performing an exposure process, an automated measurement mark, a stage, a detector, and an automated measurement sensor. The automated measurement mark(120) is formed on a predetermined portion of the lens except for a field size portion. The stage is installed under the lens. The detector(180) is used for transferring a lens magnification component from the automated measurement mark. The automated measurement sensor(140) is used for measuring the lens magnification component. The automated measurement sensor is connected to the detector.</p> |
