发明名称 |
Charged particle beam device |
摘要 |
A scanning charged particle microscope which facilitates adjustment, has a deep focal depth, and is provided with an aberration correction means. The state of aberration correction is judged from a SEM image by using a stop having plural openings and the judgment result is fed back to the adjustment of the aberration correction means. A stop of a nearly orbicular zone shape is used in combination with the aberration correction means.
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申请公布号 |
US2006255269(A1) |
申请公布日期 |
2006.11.16 |
申请号 |
US20060341663 |
申请日期 |
2006.01.30 |
申请人 |
KAWASAKI TAKESHI;NAKANO TOMONORI;HATANO MICHIO;ENYAMA MOMOYO |
发明人 |
KAWASAKI TAKESHI;NAKANO TOMONORI;HATANO MICHIO;ENYAMA MOMOYO |
分类号 |
G21K7/00 |
主分类号 |
G21K7/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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