发明名称 |
TECHNIQUES AND DEVICES FOR CHARACTERIZING SPATIALLY NON-UNIFORM CURVATURES AND STRESSES IN THIN-FILM STRUCTURES ON SUBSTRATES WITH NON-LOCAL EFFECTS |
摘要 |
<p>Techniques and devices are described to use spatially-varying curvature information of a layered structure to determine stresses at each location with non-local contributions from other locations of the structure. For example, a local contribution to stresses at a selected location on a layered structure formed on a substrate is determined from curvature changes at the selected location and a non-local contribution to the stresses at the selected location is also determined from curvature changes at all locations across the layered structure. Next, the local contribution and the non-local contribution are combined to determine the total stresses at the selected location. Techniques and devices for determining a misfit strain between a film and a substrate on which the film is deposited are also described.</p> |
申请公布号 |
WO2006122294(A2) |
申请公布日期 |
2006.11.16 |
申请号 |
WO2006US18379 |
申请日期 |
2006.05.10 |
申请人 |
CALIFORNIA INSTITUTE OF TECHNOLOGY;ROSAKIS, ARES J.;HUANG, YONGGANG |
发明人 |
ROSAKIS, ARES J.;HUANG, YONGGANG |
分类号 |
G01L1/00 |
主分类号 |
G01L1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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