| 摘要 |
A high-capacity electrostatic chuck for a flat panel display is provided to drastically simplifying the structure of the electrostatic chuck by using a lower electrode as an electrode layer fixing a glass substrate. A high-capacity electrostatic chuck includes a lower electrode(400) made of aluminum, a ceramic layer(420) formed on an upper surface of the lower electrode through spraying, and an electrostatic chuck power line(600) connected to the lower electrode itself. A lateral surface and lower surface of the lower electrode is coated with an insulation material. The ceramic layer has a thickness of about 200 to 500 micrometers. A cooling path(430) is formed in the lower electrode.
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