发明名称 AN INTEGRATED HIGH VACUUM PUMPING SYSTEM
摘要 The present invention relates to the integration of a TMP with the associated bypass line and valves so that a single sub-assembly is created. The housing of the TMP is significantly modified to accommodate the associated equipment necessary for constructing a high-vacuum system.
申请公布号 WO2006020473(A8) 申请公布日期 2006.11.16
申请号 WO2005US27596 申请日期 2005.08.03
申请人 THE BOC GROUP, INC. 发明人 BOGER, MICHAEL, S.;MURPHY, DAIMHIN, PAUL;BAILEY, CHRISTOPHER, M.;ENOMOTO, YOSHIHIRO
分类号 F04B17/03 主分类号 F04B17/03
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