发明名称 SEMICONDUCTOR MEMORY DEVICE
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a semiconductor memory device capable of preventing a failure caused by deterioration of etching accuracy in a region at a memory cell array end. <P>SOLUTION: The semiconductor memory device includes first blocks 2-0, 2-N composed of first memory cell units to which a plurality of memory cells M<SB>1</SB>to M<SB>8</SB>are connected, and second blocks 2-1 to 2-(N-1) composed of second memory cell units to which a plurality of memory cells M<SB>1</SB>to M<SB>8</SB>are connected. A memory cell array 2 is constituted by disposing the first block at opposite ends and the second block at other portions. Constitution of the first memory cell unit on the side of the memory cell array end is different from that of the second memory cell unit. It is possible to prevent a failure caused by deterioration of etching accuracy of the region at the memory cell array end, and to realize high yield operation and high reliability operation substantially without causing an increase of a chip size. <P>COPYRIGHT: (C)2007,JPO&INPIT</p>
申请公布号 JP2006313925(A) 申请公布日期 2006.11.16
申请号 JP20060175635 申请日期 2006.06.26
申请人 TOSHIBA CORP 发明人 NAKAMURA HIROSHI;ARITOME SEIICHI;IMAMIYA KENICHI;OHIRA HIDEKO;TAKEUCHI TAKESHI;SHIMIZU KAZUHIRO;NARITA KAZUHITO
分类号 H01L21/8247;G11C16/04;H01L27/115;H01L29/788;H01L29/792 主分类号 H01L21/8247
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