| 摘要 |
PROBLEM TO BE SOLVED: To provide a producing method of an ammonium cryolite which is a raw material to produce nitrogen trifluoride useful as a cleaning gas. SOLUTION: The ammonium cryolite is produced by a method that tetrafluoroammoniumaluminum and ammonium fluoride or ammonium hydrogen difluoride are reacted in a solid state, or aluminum fluoride and ammonium fluoride or ammonium hydrogen difluoride are reacted in a solid state or tetrafluoroammoniumaluminum and aluminum fluoride and ammonium fluoride or ammonium hydrogen difluoride are reacted in a solid state. COPYRIGHT: (C)2007,JPO&INPIT
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