发明名称 |
Methods, systems and computer program products for characterizing structures based on interferometric phase data |
摘要 |
Structure profiles from optical interferometric data can be identified by obtaining a plurality of broadband interferometric optical profiles of a structure as a function of structure depth in an axial direction. Each of the plurality of interferometric optical profiles include a reference signal propagated through a reference path and a sample signal reflected from a sample reflector in the axial direction. An axial position corresponding to at least a portion of the structure is selected. Phase variations of the plurality of interferometric optical profiles are determined at the selected axial position. A physical displacement of the structure is identified based on the phase variations at the selected axial position.
|
申请公布号 |
US2006256343(A1) |
申请公布日期 |
2006.11.16 |
申请号 |
US20060337166 |
申请日期 |
2006.01.20 |
申请人 |
CHOMA MICHAEL;IZATT JOSEPH A;ELLERBEE AUDREY;SARUNIC MARINKO |
发明人 |
CHOMA MICHAEL;IZATT JOSEPH A.;ELLERBEE AUDREY;SARUNIC MARINKO |
分类号 |
G01B9/02 |
主分类号 |
G01B9/02 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|