CONTROLLED VAPOR DEPOSITION OF BIOCOMPATIBLE COATINGS FOR MEDICAL DEVICES

摘要

We have developed an improved vapor-phase deposition method and apparatus for the application of layers and coatings on various substrates. The method and apparatus are useful in the fabrication of biofunctional devices, Bio-MEMS devices, and in the fabrication of microfluidic devices for biological applications. In one important embodiment, oxide / polyethylene glycol coatings provide increased hydrophilicity and improved biocompatibility for medical devices and implants.