| 摘要 |
A cleaning apparatus and a cleaning method using the same are provided to increase the number of substrates to be processed and shorten the time for cleaning process, by performing the ultrasonic cleaning of substrates in a conveyer type. A conveyer(230) loads and transfers a substrate to be cleaned. An ultrasonic generator(240) is installed above the conveyer, and generates ultrasonic waves on the substrate. A buffer(250) temporarily stores the substrate, which passes through the ultrasonic generator. The ultrasonic generator includes an air blower. The buffer includes a plurality of jigs, wherein the jigs support the substrate while the substrate is raised by the jigs. |
