| 摘要 |
<p>It is possible to eliminate charge-up when creating a focus map for an electron beam device for inspecting a sample. An auto focus (AF) control device (2) controls to move an actuator (38) for moving a focus lens (32) of an optical microscope (3) while acquiring a contrast signal from the optical microscope (3) for each of the focus measurement points on the surface of a sample (W) under control of a PC device (1), thereby automatically focusing on the surface of the sample (W) and detecting a focus value of the optical microscope corresponding to a position (height) of the sample surface in the optical axis direction. The PC device (1) receives the detected focus value, converts the focus value to voltage to be applied to the electrostatic lens of the electron beam device (100) during actual sample inspection, and store the converted value.</p> |
