| 摘要 |
A theme is to prevent the generation of noise due to damage in a photodetecting portion in a mounting process in a photodiode array, a method of manufacturing the same, and a radiation detector. In a photodiode array, wherein a plurality of photodiodes ( 4 ) are formed in array form on a surface at a side of an n-type silicon substrate ( 3 ) onto which light to be detected is made incident and penetrating wirings ( 8 ), which pass through from the incidence surface side to the back surface side, are formed for the photodiodes ( 4 ), the photodiode array ( 1 ) is arranged with a transparent resin film ( 6 ), which covers the formed regions of the photodiodes ( 4 ) and transmits the light to be detected, provided at the incidence surface side.
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