发明名称 |
Sample inspection apparatus |
摘要 |
A sample inspection apparatus comprises a sample support; a detection system for detecting radiation emitted by or transmitted through a sample on the sample support in response to radiation incident on the sample; and a cooling system for cooling at least one of the sample support and detection system. The cooling system includes at least one oscillating, mechanical component which oscillates at a frequency different from the at least one of the support and detection system.
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申请公布号 |
US2006255290(A1) |
申请公布日期 |
2006.11.16 |
申请号 |
US20050125317 |
申请日期 |
2005.05.10 |
申请人 |
OXFORD INSTRUMENTS ANALYTICAL LIMITED |
发明人 |
BHADARE SANTOKH S.;BARKSHIRE IAN R.;TURNER DANIEL F. |
分类号 |
H01J37/244 |
主分类号 |
H01J37/244 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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