发明名称 |
Method of forming optical images, apparatus for carrying out said method and process for manufacturing a device using said method |
摘要 |
An optical image is formed in a resist layer ( 5 ) by a number of subilluminations, in each of which an array of light valves ( 21 25 ) and a corresponding array ( 40 ) of light converging elements are used to form a pattern of spots in the resist layer according to a sub image Between the sub illuminations, the resist layer ( 5 ) is displaced relative to the arrays ( 21 25, 40 ) The scale of the optical image in the resist layer ( 5 ) is measured and this scale is compared with the scale of the image required to be wpitten If there is a difference, the spacing between the light converging elements ( 43 ) is physically altered to adjust the substrate scale
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申请公布号 |
US2006256310(A1) |
申请公布日期 |
2006.11.16 |
申请号 |
US20060569186 |
申请日期 |
2006.02.22 |
申请人 |
VAN DE RIJDT JOHANNES H A;TIMMERMANS ROGER A M |
发明人 |
VAN DE RIJDT JOHANNES H.A.;TIMMERMANS ROGER A.M. |
分类号 |
G03B27/54;G03F1/14;G03F7/20;G03G15/32 |
主分类号 |
G03B27/54 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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