| 摘要 |
<p>An ionization vacuum gauge includes a vacuum container (4) connected in a communicating state with a vacuum device and having at least three electrodes of a grid (2), an electron source (3) and an ion collector (1). Electrons, as emitted from the electron source (3), are vibrated inward and outward of the grid (2), thereby to ionize the gas molecules coming into the grid (2), with the vibrated electrons. The ions are collected by the ion collector (1) and converted into an electric current signal, so that the gas molecule density (pressure) in the vacuum device is measured from the current intensity obtained. The ion collector (1) is equipped with a heating deice for heating itself.</p> |
