| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a manufacturing method of a color filter, with which a film pattern of multiple stage thickness can be formed efficiently. <P>SOLUTION: The manufacturing method of the color filter comprises an exposure step of exposing a multigradation pattern onto a photosensitive film, a developing step of forming a multiple stage film 30b, by developing the photosensitive film on which the multigradation pattern is exposed and a washing step of washing the multiple stage film 30b. In the exposure step, an optical dot of prescribed size is projected to the photosensitive film, and further the optical dot is projected onto the photosensitive film in piles, while being shifted by a distance smaller than the diameter of the optical dot to expose the multigradation pattern. In the washing step, liquid droplets are ejected obliquely against the multiple stage film 30b. <P>COPYRIGHT: (C)2007,JPO&INPIT |
