| 摘要 |
PROBLEM TO BE SOLVED: To provide a crosslinked polymer having high glass transition temperature and low hygroscopic property, which can be used especially for a coating agent and an adhesive agent. SOLUTION: The polymer is a poly(arylene ether)polymer having a repeating unit of the following formula, -(O-Ar<SB>1</SB>-O-Ar<SB>2</SB>-O-)<SB>m</SB>-(-O-Ar<SB>3</SB>-O-Ar<SB>4</SB>-O)<SB>m</SB>-. In the formula, Ar<SB>1</SB>, Ar<SB>2</SB>, Ar<SB>3</SB>and Ar<SB>4</SB>are the same or different aryl groups, m is 0-1, n is 1-m, and at least one of these aryl groups is nonaromatic. The polymer does not generate a volatile substance while hardening at a hardening temperature below 200°C and is crosslinked without generating a functional group to form a hardened film. The hardened film has Tg of 160-180°C, a frequency independent permittivity of less than 2.7 and the maximum moisture absorption of less than 0.17 wt.%. The polymer is especially useful as an adhesive for an interlayer dielectric material and for attaching a die. COPYRIGHT: (C)2007,JPO&INPIT
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