| 摘要 |
PROBLEM TO BE SOLVED: To perform size and shape measurement and inspection by displaying overall pickup images of workpieces in a focused state. SOLUTION: This three-dimensional shape inspection machine is constituted of: a stage 6 for mounting an object 5 to be inspected; an imaging system comprising a projector lens 4 and an image pickup device 3 for imaging the object to be inspected; a stage Z-axis position sensor 11 for detecting the position of the stage 6 in the direction of a Z-axis; a monitor 16 for displaying the image etc. of the object to be inspected; and a computer main body 15 for instructing the stage to move vertically, processing the image of the object to be inspected, and displaying it on the monitor 16. The computer main body 15 divides a plan-view image of the object to be inspected into a plurality of images according to the depth of focus on the basis of both shape data of the object 5 to be inspected and the depth of focus of the projector lens 4, determines the position of the relative vertical movement of the stage 6 at which each image is focused as imaging positions, sequentially moves the stage to the imaging positions, images the object to be inspected at each imaging position by the imaging system, extracts focused parts from a plurality of pickup images, synthesizes them, creates an image in a focused state as a whole, and displays it on the monitor. COPYRIGHT: (C)2007,JPO&INPIT
|
