| 摘要 |
PROBLEM TO BE SOLVED: To provide a scanning probe microscope capable of reducing the vibration noise occurring at intermittent raster scans. SOLUTION: In the scanning probe microscope, an amplitude value of a Y-scan signal is increased linearly only during an image acquisition period of time Tyu for acquiring image data, and brought to return to about zero immediately just after completing the acquisition of the image data. Meanwhile, an amplitude value of an X-scan signal which is the value at the acquisition time of the image data, is kept constant all the time. COPYRIGHT: (C)2007,JPO&INPIT
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