发明名称 |
Optical interference display cell and method of making the same |
摘要 |
An optical interference display cell is described. A first electrode and a sacrificial layer are sequentially formed on a transparent substrate and at least two openings are formed in the first electrode and the sacrificial layer to define a position of the optical interference display cell. An insulated heat-resistant inorganic supporter is formed in each of the openings. A second electrode is formed on the sacrificial layer and the supporters. Finally, a remote plasma etching process is used for removing the sacrificial layer.
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申请公布号 |
US2006257070(A1) |
申请公布日期 |
2006.11.16 |
申请号 |
US20060413603 |
申请日期 |
2006.04.28 |
申请人 |
LIN WEN-JIAN;TSAI HSIUNG-KUANG |
发明人 |
LIN WEN-JIAN;TSAI HSIUNG-KUANG |
分类号 |
G02B6/26;B81B7/00;B81C1/00;G02B26/00;H01L21/302;H01L21/3065;H01L21/461 |
主分类号 |
G02B6/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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