发明名称 |
Substrate conveyance device and substrate conveyance method, exposure apparatus and exposure method, device manufacturing method |
摘要 |
A substrate conveyance device that conveys a substrate having been exposed with a pattern image via a projection optical system and a liquid, the substrate conveyance device comprising: a liquid detector that detects the liquid adhering on the substrate.
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申请公布号 |
US2006257553(A1) |
申请公布日期 |
2006.11.16 |
申请号 |
US20060398572 |
申请日期 |
2006.04.06 |
申请人 |
NIKON CORPORATION |
发明人 |
OHTA ATSUSHI;HORIUCHI TAKASHI |
分类号 |
C23C16/52;B05C11/00;G03F7/20;H01L21/027 |
主分类号 |
C23C16/52 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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