INSPECTION DEVICE OF MICRO STRUCTURE, INSPECTION METHOD OF MICRO STRUCTURE AND INSPECTION PROGRAM OF MICROSTRUCTURE

摘要

PROBLEM TO BE SOLVED: To provide an inspection device, an inspection method and an inspection program for detecting accurately a structure having a micro movable part by a simple system.

SOLUTION: A test sound wave is output from a speaker 2. The movable part of a triaxial acceleration sensor which is a micro structure of a detection chip TP is moved by arrival of the test sound wave which is a compressional wave output from the speaker 2, namely, by air vibration. A change of a resistance value changing based on the movement is measured based on an output voltage applied through a probe needle 4. A control part 20 determines a characteristic of the triaxial acceleration sensor based on a measured characteristic value, namely, measured data.

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