| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a thin film resistor with large specific resistance and a small absolute value of the modulus of a resistor temperature coefficient, and to provide a method of manufacturing it. <P>SOLUTION: A thin film is made of nickel, chromium, silicon and carbon. The content of the silicon and the carbon in the thin film is 40 to 65 mass%, and the mass ratio of the chromium to the nickel is 0.15-1.1. The thin film is heat-treated to obtain a thin film resistor with a specific resistance of 500-3,000μΩcm, and a resistance temperature coefficient of -25 to +25 ppm/°C. The temperature of the heat treatment is selected according to the composition of the thin film in a range of 400-800°C. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
