发明名称 |
Fabrication method of IC inlet, ID tag, ID tag reader and method of reading date thereof |
摘要 |
A method accurately inspects whether an IC inlet to be inspected is non-defective or defective in a state in which a large number of IC inlets are formed over an insulating film. The inspection of IC inlets formed over an insulating film is performed by transmitting microwaves to the IC inlets from antennas. To selectively irradiate the microwaves to only one IC inlet to be inspected out of a large number of IC inlets that are formed over the insulating film, a radio-wave absorbing plate is inserted between the insulating film and the antennas, and the microwaves are irradiated to the IC inlet through a slit formed in the radio-wave absorbing plate. The radio-wave absorbing plate is configured such that the slit, which is substantially equal to the IC inlet in size, is formed in a portion of a planar plate that is formed of a radio-wave absorber.
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申请公布号 |
US2006258025(A1) |
申请公布日期 |
2006.11.16 |
申请号 |
US20060491275 |
申请日期 |
2006.07.24 |
申请人 |
OKAMOTO MICHIO;YAMAGATA HISAO;MURAKAMI NOBUO;KAKITANI KEIZO;FUJIWARA HIDEHIRO;SAITOU TAKESHI |
发明人 |
OKAMOTO MICHIO;YAMAGATA HISAO;MURAKAMI NOBUO;KAKITANI KEIZO;FUJIWARA HIDEHIRO;SAITOU TAKESHI |
分类号 |
H01L21/66;G01N22/04;G01R23/16;G01S3/02;G01V3/00;G06K7/08;G06K17/00;G06K19/07;G06K19/077;H01L21/02;H01L21/56;H01L21/60;H01L23/498;H01Q1/22;H01Q17/00 |
主分类号 |
H01L21/66 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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