| 摘要 |
A dummy piezoelectric element is disposed at least at one of the ends of an array of piezoelectric vibration elements. A region not including internal electrodes is provided in the vicinity of the outer side surface of the dummy piezoelectric vibration element to be formed. When the outer side surface of the dummy piezoelectric element is cut, a shift of a cutting line from a correct cutting line, which is due to high hardness of the internal electrodes, is minimized.
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