| 发明名称 |
Methods for forming an enriched metal oxide surface |
| 摘要 |
Methods of forming a metal oxide surface that is enriched with metal oxide in its higher oxidation state are provided. A metal oxide surface that is enriched with metal oxide in its higher oxidation state is also provided.
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| 申请公布号 |
US2006258172(A1) |
申请公布日期 |
2006.11.16 |
| 申请号 |
US20060487080 |
申请日期 |
2006.07.14 |
| 申请人 |
RUSSELL STEPHEN W;HINEMAN MAX |
发明人 |
RUSSELL STEPHEN W.;HINEMAN MAX |
| 分类号 |
H01L21/31;H01L21/469 |
主分类号 |
H01L21/31 |
| 代理机构 |
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