Use of a disc laser for the crystallization of silicon layers
摘要
<p>A laser exhibits a mode number (M2>) of 7 or more in one orthogonal direction and 5 or less in the other orthogonal direction. The anamorphotic resonator of the laser exhibits an optical element (22).</p>
申请公布号
EP1722449(A1)
申请公布日期
2006.11.15
申请号
EP20050010335
申请日期
2005.05.12
申请人
INNOVAVENT GMBH
发明人
BURGHARDT, BERTHOLD, DR. DIPL.-PHYS.;BRUNWINKEL, KLAUS;KAHLERT, HANS-JUERGEN, DR.;SCHMIDT, HENNING, DR.;GABLER, THOMAS, DR.;HEIST, PETER, DR.;HOLLEMANN, GUENTER, DR.;KRAUSE, ULF, DR.
