Contact probe and test apparatus and test method

摘要

A contact is formed of a tip end portion (11) approximately cylindrical as a whole in shape, having at one end a contact end to come into contact with a circuit under test, and a base portion (12) provided to be opposed to and kept apart from the other end that is opposite to the contact end of the tip end portion. By pressing the tip end portion into contact with a circuit under test (20), the tip end portion and the base portion are brought into contact with each other, and further pushing causes dislocation at the contact surfaces (14,15) so that the tip end portion is moved in a direction parallel to a surface of the circuit under test. Therefore, when the contact probe is pressed into contact with the circuit under test, the contact end of the contact probe is moved such that it scrapes off the surface of the circuit under test to break the insulating film on the surface, resulting in reliable contact with the circuit under test.