UMWELTSPERRSCHICHT FÜR SUBSTRATE AUF DER BASIS VON SILIZIUM,申请号AT20040252991T-传众专利搜索

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发明名称	UMWELTSPERRSCHICHT FÜR SUBSTRATE AUF DER BASIS VON SILIZIUM
摘要
申请公布号	AT342245(T)	申请公布日期	2006.11.15
申请号	AT20040252991T	申请日期	2004.05.21
申请人	UNITED TECHNOLOGIES CORPORATION	发明人	SUN, ELLEN Y.;LINDSEY, GARY D.;HOLOWCZAK, JOHN E.;BALDWIN, NEIL R.;EATON, HARRY E.
分类号	B32B18/00;C04B41/52;C04B41/89;C23C4/10;C23C28/00;C23C28/04;F01D5/28;(IPC1-7):C04B41/52	主分类号	B32B18/00
代理机构		代理人
主权项
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